Headquartered in Leuven, Belgium, Imec has built a strong partnership with KU Leuven, other universities, governments, and leading industrial companies. This active collaboration is essential to develop solutions that are accompanied by a short time-to-market. Together with its partners, Imec tries to tackle existing challenges in the semiconductor industry and beyond. Imec’s leading cleanroom infrastructure can address various demands of the equipment-intensive semiconductor industry and stays ahead of changes in technology.

The multifaced nature of ULTRA-LUX project requires extensive use of optoelectronic and semiconductor equipment. To solve integration challenges, imec provides a full-scale 200mm class 1 cleanroom that includes the following equipment:

Characterization techniques:

  • AFM and Profilometer setups
  • SEM
  • Four-point Probe and Hall measurement setups
  • UV-Vis-NIR, Reflectance, and Ellipsometry measurements
  • Electrical Parameter Analyzers
  • Optical Microscopes
  • XRD, XRR and similar techniques

Deposition and patterning tools:

  • Wet benches and Process baths
  • Lithography with back-to-front alignment
  • Evaporation tools (organic, metal)
  • Sputtering tools (metal, oxides)
  • E-beam Lithography and Deposition equipment
  • Ion-milling machines
  • Atomic Layer Deposition technique
  • (Plasma Enhanced) Chemical Vapour Deposition
  • Inductively Coupled Plasma etchers

To get a deeper insight into the underlying physical and photo-chemical processes, imec has a portfolio of advanced characterization techniques, such as:

  • Raman techniques
  • Rutherford Backscattering (RBS), Elastic Recoil Detection (ERD), Proton Induced X-ray Emission (PIXE)
  • Secondary Ion Mass Spectrometry (SIMS)
  • Transmission Electron Microscopy (TEM)
  • X-ray Photoelectron Spectroscopy (XPS)

Our perovskite wetlabs include:

  • Perovskite-dedicated gloveboxes (solvent and solvent-free)
  • Encapsulation setups
  • Advanced characterization glovebox for optoelectronic measurement
  • Evaporation setups, also for perovskite materials
  • Plasma chambers
  • Solar-cell and Photodetector benchmarking equipment
  • Advanced pulse generator equipment and cryogenic chambers

Our optical capabilities are:

  • Optical excitation in the UV and Vis range using a 300uJ Q-switched ns-pulsed laser
  • Optical gain measurement setup using Variable Stripe Length (VSL) technique
  • High resolution imaging spectroscopy
  • Spectroscopy in cryogenic conditions

A more extensive list of imec’s laboratories can be found here.